Pulsed ablation deposition (PAD) has been used to deposit indium tin oxide (ITO) films on SiO2 substrates at room temperature using anArF excimer laser. High optical transmission above 88% occurred in the visible region, the refractive index (2.0 at 540 nm) was observed to be very close to the one of the bulk target; the extinction coefficientwas lowand almost constant (6 103) through the visible range. An energy gap of about 3.6 eV has been calculated for the deposited films. The film thickness profilometer (FTP) and simulations using a computer code (refractor) give approximately the same result for the film thickness (370 nm). The electrical resistivity was as low as 4 x 10-6 ohmm. From the atomic force microscopy (AFM) observations, the films had a rough surface with average roughness 20 nm. Pores were observed with a density of 150 pores/mm2 and average size of 250 nm. Therefore films exhibited large surface area, which suggest applications in dye solar cells (DSC).

Deposition of ITO films on SiO2 substrates

CARICATO, Anna Paola;MARTINO, Maurizio;
2005

Abstract

Pulsed ablation deposition (PAD) has been used to deposit indium tin oxide (ITO) films on SiO2 substrates at room temperature using anArF excimer laser. High optical transmission above 88% occurred in the visible region, the refractive index (2.0 at 540 nm) was observed to be very close to the one of the bulk target; the extinction coefficientwas lowand almost constant (6 103) through the visible range. An energy gap of about 3.6 eV has been calculated for the deposited films. The film thickness profilometer (FTP) and simulations using a computer code (refractor) give approximately the same result for the film thickness (370 nm). The electrical resistivity was as low as 4 x 10-6 ohmm. From the atomic force microscopy (AFM) observations, the films had a rough surface with average roughness 20 nm. Pores were observed with a density of 150 pores/mm2 and average size of 250 nm. Therefore films exhibited large surface area, which suggest applications in dye solar cells (DSC).
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11587/108491
 Attenzione

Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo

Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 20
  • ???jsp.display-item.citation.isi??? 17
social impact