Additive Manufacturing Electronics (AME) is a promising method that has the potential to directly embed piezoelectric micromachined ultrasonic transducer (PMUT) probes into conventional electronic circuits and boards. It enables fast customized prototyping, three-dimensional circuit boards, and small-series production. In this study, annular probes composed of circular suspended Aluminum Nitride (AlN)-based PMUT membranes, addressed in 2-dimensional arrays, were designed, fabricated, and encapsulated using AME technology.
Additive Manufacturing Electronics for Packaging High-Frequency Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducer Probes
Vincenzo Mariano Mastronardi
Primo
;Antonio Qualtieri;Piero Tortoli;Roberto De Fazio;Paolo Visconti;Maria Teresa Todaro;Massimo De Vittorio
2024-01-01
Abstract
Additive Manufacturing Electronics (AME) is a promising method that has the potential to directly embed piezoelectric micromachined ultrasonic transducer (PMUT) probes into conventional electronic circuits and boards. It enables fast customized prototyping, three-dimensional circuit boards, and small-series production. In this study, annular probes composed of circular suspended Aluminum Nitride (AlN)-based PMUT membranes, addressed in 2-dimensional arrays, were designed, fabricated, and encapsulated using AME technology.File in questo prodotto:
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