Sol-gel process was used to prepare pure and palladium-modified SnO2 thin films for gas sensors application. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) techniques were used to analyse the structure, the chemical composition and the morphology of the prepared films. Pure tin oxide films have shown gas-sensing characteristics similar to most of the SnO2 films realized with other more expensive and more elaborate methods of preparation. Pd-doped SnO2 films have shown an improvement in the sensitivity, probably due to the Pd catalytic effect and to the induced microstructural changes.
Tin oxide-based gas sensors prepared by the sol-gel process
RELLA, Roberto;SICILIANO, PIETRO;VASANELLI, Lorenzo;LICCIULLI, ANTONIO ALESSANDRO;
1997-01-01
Abstract
Sol-gel process was used to prepare pure and palladium-modified SnO2 thin films for gas sensors application. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) techniques were used to analyse the structure, the chemical composition and the morphology of the prepared films. Pure tin oxide films have shown gas-sensing characteristics similar to most of the SnO2 films realized with other more expensive and more elaborate methods of preparation. Pd-doped SnO2 films have shown an improvement in the sensitivity, probably due to the Pd catalytic effect and to the induced microstructural changes.File in questo prodotto:
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