In this work the analysis, fabrication and optical characterization of a circular two-dimensional photonic crystal (2D-CPC) nano-resonator based on a air/GaAs/air slab waveguide are presented. Four InAs/InGaAs quantum dots (QDs) stacked layers emitting around 1300 nm were embedded in a GaAs waveguide layer grown on an Al0.7Ga0.3As sacrificial layer. The nano-resonator was realized by drilling 2D-PC air holes arranged in a circular lattice configuration through electron beam lithography (EBL), inductively coupled plasma (ICP) etching and wet selective etching of the Al0.7Ga0.3As sacrificial layer in order to release the membrane. The spectral response of the active circular nano-cavity has been simulated by using a three dimensional finite-difference time-domain method (3D-FDTD) as a function of both the inner and outer holes radius/period ratios of the photonic crystal structure. Good agreement between the calculated resonance and the experimental results, recorded from the nano-cavity by a μPL setup, has been achieved.
Quantum dot nano-cavity emission tuned by a circular photonic crystal lattice
DE VITTORIO, Massimo
2007-01-01
Abstract
In this work the analysis, fabrication and optical characterization of a circular two-dimensional photonic crystal (2D-CPC) nano-resonator based on a air/GaAs/air slab waveguide are presented. Four InAs/InGaAs quantum dots (QDs) stacked layers emitting around 1300 nm were embedded in a GaAs waveguide layer grown on an Al0.7Ga0.3As sacrificial layer. The nano-resonator was realized by drilling 2D-PC air holes arranged in a circular lattice configuration through electron beam lithography (EBL), inductively coupled plasma (ICP) etching and wet selective etching of the Al0.7Ga0.3As sacrificial layer in order to release the membrane. The spectral response of the active circular nano-cavity has been simulated by using a three dimensional finite-difference time-domain method (3D-FDTD) as a function of both the inner and outer holes radius/period ratios of the photonic crystal structure. Good agreement between the calculated resonance and the experimental results, recorded from the nano-cavity by a μPL setup, has been achieved.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
