A grating resolution of up to 200 nm is achieved using room-temperature nanoimprint lithography on several different light-emitting low-molar-mass organic semiconductors, without any degradation of the active materials after patterning (see Figure). This could be the only process that permits the transfer of a height profile to films of this very important class of low-molar-mass conjugated molecules with poor thermoplastic behavior.
Room-Temperature Nanoimprint Lithography of non-Thermoplastic Organic Films
PISIGNANO, Dario;VISCONTI, Paolo;
2004-01-01
Abstract
A grating resolution of up to 200 nm is achieved using room-temperature nanoimprint lithography on several different light-emitting low-molar-mass organic semiconductors, without any degradation of the active materials after patterning (see Figure). This could be the only process that permits the transfer of a height profile to films of this very important class of low-molar-mass conjugated molecules with poor thermoplastic behavior.File in questo prodotto:
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