High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography

Businaro, L.; Romanato, F.; Candeloro, P.; Andreani, C.; Galli, M.; Patrini, M.; Passaseo, A.; De Vittorio, Massimo; Di Fabrizio, E.

doi:10.1116/1.1547726

The fabrication of two-dimensional photonic band gap structures by using x-ray lithography combined with ion etching on metalorganic chemical vapor deposition grown GaAs/AlGaAs waveguides was discussed. The optical characterizations of photonic crystal samples were also performed. The characterizations showed the presence of well-defined photonic band gap structures and second harmonic property generation.

Titolo:	High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography
Autori:	L. BUSINARO F. ROMANATO P. CANDELORO C. ANDREANI M. GALLI M. PATRINI A. PASSASEO DE VITTORIO, Massimo E. DI FABRIZIO mostra contributor esterni nascondi contributor esterni
Data di pubblicazione:	2003
Rivista:	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B
Abstract:	The fabrication of two-dimensional photonic band gap structures by using x-ray lithography combined with ion etching on metalorganic chemical vapor deposition grown GaAs/AlGaAs waveguides was discussed. The optical characterizations of photonic crystal samples were also performed. The characterizations showed the presence of well-defined photonic band gap structures and second harmonic property generation.
Handle:	http://hdl.handle.net/11587/107230
Appare nelle tipologie:	Articolo pubblicato su Rivista

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