The fabrication of two-dimensional photonic band gap structures by using x-ray lithography combined with ion etching on metalorganic chemical vapor deposition grown GaAs/AlGaAs waveguides was discussed. The optical characterizations of photonic crystal samples were also performed. The characterizations showed the presence of well-defined photonic band gap structures and second harmonic property generation.

High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography

DE VITTORIO, Massimo;
2003

Abstract

The fabrication of two-dimensional photonic band gap structures by using x-ray lithography combined with ion etching on metalorganic chemical vapor deposition grown GaAs/AlGaAs waveguides was discussed. The optical characterizations of photonic crystal samples were also performed. The characterizations showed the presence of well-defined photonic band gap structures and second harmonic property generation.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11587/107230
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