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EnglishWe present the fabrication of high refractive index contrast two-dimensional photonic crystal (2D-PC) slab waveguides. 2D photonic crystal structures, consisting of a periodic array of holes in a GaAs matrix, are obtained by nanopatterning of epitaxially grown GaAs/AlGaAs heterostructures. Two different PC structures will be described in detail: (i) an asymmetric 2D-PC slab waveguide obtained by selective oxidation which transforms the Al-rich AlGaAs cladding layer underneath the PCs into aluminium oxide and (ii) a symmetric 2D-PC slab waveguide obtained by removing the oxide (free standing structure).
| Titolo: | Nanofabrication of high refractive index contrast two-dimensional photonic crystal waveguides |
| Autori: | |
| Data di pubblicazione: | 2003 |
| Rivista: | |
| Abstract: | We present the fabrication of high refractive index contrast two-dimensional photonic crystal (2D-PC) slab waveguides. 2D photonic crystal structures, consisting of a periodic array of holes in a GaAs matrix, are obtained by nanopatterning of epitaxially grown GaAs/AlGaAs heterostructures. Two different PC structures will be described in detail: (i) an asymmetric 2D-PC slab waveguide obtained by selective oxidation which transforms the Al-rich AlGaAs cladding layer underneath the PCs into aluminium oxide and (ii) a symmetric 2D-PC slab waveguide obtained by removing the oxide (free standing structure). |
| Handle: | http://hdl.handle.net/11587/107226 |
| Appare nelle tipologie: | Articolo pubblicato su Rivista |
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