Monolithic CMOS sensors are being proposed for the upgrade of the ATLAS inner tracker. Sensors fabricated in a new TowerJazz 180nm process, feature full depletion of the sensitive layer and radiation tolerance up to 1015neq/cm2.
Radiation Hardness Studies on a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors
Schioppa E. J.;
2017-01-01
Abstract
Monolithic CMOS sensors are being proposed for the upgrade of the ATLAS inner tracker. Sensors fabricated in a new TowerJazz 180nm process, feature full depletion of the sensitive layer and radiation tolerance up to 1015neq/cm2.File in questo prodotto:
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