In the last years, we are assisting to a continuous drive toward the use of hybrid metrology systems, which can combine noncontact and contact sensors to take advantage of the speed of 3-D optical sensors and of the accuracy of traditional contact solutions. We show how approaches for multisensor data fusion can be combined to control charting in order to detect (and distinguish between) out-of- control states due to the measurement and/or to the manufacturing processes.
An SPC Procedure Based on Multisensor Metrology Data Fusion
PACELLA, Massimo;
2011-01-01
Abstract
In the last years, we are assisting to a continuous drive toward the use of hybrid metrology systems, which can combine noncontact and contact sensors to take advantage of the speed of 3-D optical sensors and of the accuracy of traditional contact solutions. We show how approaches for multisensor data fusion can be combined to control charting in order to detect (and distinguish between) out-of- control states due to the measurement and/or to the manufacturing processes.File in questo prodotto:
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