A novel implantation technique, using laser ablation induced plasmas as ion souces, was developed.
Laser- assisted ion implantation
BELLONI, fabio;CARETTO, GIUSEPPE;DORIA, Domenico;LORUSSO, ANTONELLA;NASSISI, Vincenzo
2006-01-01
Abstract
A novel implantation technique, using laser ablation induced plasmas as ion souces, was developed.File in questo prodotto:
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